2057
Challenges for Scaled Damascene Interconnects

Monday, October 28, 2013: 14:00
Union Square 21, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Silvia Armini, Ph.D. , imec, Heverlee, Belgium
Johan Swerts , imec
Nicolas Jourdan , imec, Leuven, Belgium
Yong Kong Siew , imec
Juergen Boemmels , imec
Zsolt Tokei, PhD , imec
Herbert Struyf, Ph.D. , imec

Abstract:

See more of: Invited Talks 2
See more of: E7: Processing, Materials, and Integration of Damascene and 3D Interconnects 5
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