1861
(Invited) Vapor Phase Surface Functionalization Using Atomic Layer Deposition (ALD) and Self Assembled Molecules (SAMs)

Wednesday, October 30, 2013: 17:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Ganesh M. Sundaram , Ultratech-Cambridge NanoTech, Waltham, MA
Laurent Lecordier , Ultratech-Cambridge NanoTech
R. Bhatia , Ultratech-Cambridge NanoTech

Abstract:

  • E2-1861 (219.4KB) - Abstract Text
See more of: Reaction Mechanisms & Characterization
See more of: E2: Atomic Layer Deposition Applications 9
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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