NEMS - MEMS and Sensor Systems

Wednesday, May 14, 2014: 14:00-16:10
Taylor, Ground Level (Hilton Orlando Bonnet Creek)
Chairs:
Ajit Khosla , Edward M Sabolsky and Durga Misra
14:00
1386
(Invited) Nano-Derived Microsensors for Monitoring Gas Species in Harsh-Environments
E. M. Sabolsky, E. Çiftyürek, C. Wildfire, K. Sabolsky, J. Taub, K. Sierros (West Virginia University), and T. H. Evans (WV Robotic Technology Center, West Virginia University)
14:30
1387
(Invited) Thermochromic Phase Transitions in VO2-Based Thin Films for Energy-Saving Applications
S. C. Barron, J. M. Gorham, and M. L. Green (National Institute of Standards and Technology)
15:00
Intermission
15:10
1388
Flexible Nanocomposite Polymer Based Sensors for Breast Cancer Diagnostics
A. Khosla (Dept. of Mechanical and Industrial Engineering, CONCORDIA University)
15:40
1389
An Etch Stop and Sacrificial Materials Study for 3D NEMS-CMOS Co-Integration
J. Philippe, I. Ouerghi, O. Pollet, S. Hentz, J. Arcamone, and T. Ernst (CEA-LETI)
16:00
Concluding Remarks
See more of: N2: Dielectrics for Nanosystems 6: Materials Science, Processing, Reliability and Manufacturing
See more of: Dielectric Science and Materials
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