N2 Dielectrics for Nanosystems 6: Materials Science, Processing, Reliability and Manufacturing
N2 Dielectrics for Nanosystems 6: Materials Science, Processing, Reliability and Manufacturing
Sponsor(s):
Dielectric Science and Technology,
Electronics and Photonics
Lead Organizer: Durga Misra (New Jersey Institute of Technology)
Co-organizers: Yaw S. Obeng (NIST) , Toyohiro Chikyow (National Institute for Materials Science) , Hiroshi Iwai (Tokyo Institute of Technology) , Z. Chen (University of Kentucky) and D. Bauza (Institut de Microelectronique)