Dielectric Characterization

Tuesday, May 13, 2014: 08:00-09:30
Taylor, Ground Level (Hilton Orlando Bonnet Creek)
Chairs:
Yaw S. Obeng and Zhi David Chen
08:00
1365
Dielectric/Si Interface Quality Characterization Using Room Temperature Photoluminescence
W. S. Yoo (WaferMasters, Inc.), B. G. Kim, S. W. Jin (SK hynix, Inc.), T. Ishigaki, and K. Kang (WaferMasters, Inc.)
08:20
1366
Light Wavelength Effects on Charge Trapping and Detrapping of AlOx Embedded ZrHfO High-K Stack
X. Liu (Texas A&M University, Ohio University), Y. Kuo, S. Zhang (Texas A&M University), and T. Yuan (Ohio University)
08:40
1367
Temperature Dependence of Defect Evolution and Distribution in Thermally Cycled Cu-TSVs
J. B. Marro (Clemson University, University of Central Florida), C. A. Okoro, Y. S. Obeng (NIST), K. A. Richardson (University of Central Florida, Clemson University), and K. Chamma (University of Central Florida)
09:00
1368
(Invited) Scanning Probe Microscopes for Subsurface Imaging
J. J. Kopanski, L. You, J. J. Ahn, E. Hitz, and Y. S. Obeng (NIST)
See more of: N2: Dielectrics for Nanosystems 6: Materials Science, Processing, Reliability and Manufacturing
See more of: Dielectric Science and Materials
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