Dielectric Characterization

Tuesday, May 13, 2014: 08:00-09:30
Taylor, Ground Level (Hilton Orlando Bonnet Creek)
Yaw S. Obeng and Zhi David Chen
Dielectric/Si Interface Quality Characterization Using Room Temperature Photoluminescence
W. S. Yoo (WaferMasters, Inc.), B. G. Kim, S. W. Jin (SK hynix, Inc.), T. Ishigaki, and K. Kang (WaferMasters, Inc.)
Light Wavelength Effects on Charge Trapping and Detrapping of AlOx Embedded ZrHfO High-K Stack
X. Liu (Texas A&M University, Ohio University), Y. Kuo, S. Zhang (Texas A&M University), and T. Yuan (Ohio University)
Temperature Dependence of Defect Evolution and Distribution in Thermally Cycled Cu-TSVs
J. B. Marro (Clemson University, University of Central Florida), C. A. Okoro, Y. S. Obeng (NIST), K. A. Richardson (University of Central Florida, Clemson University), and K. Chamma (University of Central Florida)
(Invited) Scanning Probe Microscopes for Subsurface Imaging
J. J. Kopanski, L. You, J. J. Ahn, E. Hitz, and Y. S. Obeng (NIST)