(Invited) Electro-Thermal Characterization of SiGe HBT PA-Cells
The higher the speed of advanced HBTs is the higher are their current densities and internal electric fields. This leads to increased self-heating and potential thermal instabilities. Their detailed impact on device characteristics and parameter extraction are investigated from a theoretical point of view with 3D thermal simulations, and from an experimental point of view with pulsed DC and AC measurements. Furthermore the impact of deep trenches on heat dissipation is analyzed as well as the thermal coupling with adjacent emitter fingers and pcells.