Metals and Gettering

Tuesday, 7 October 2014: 16:00-17:20
Expo Center, 1st Floor, Universal 17 (Moon Palace Resort)
Chairs:
Ruben R. Lieten and Gudrun Helga Kissinger
16:00
1655
Modeling of Carbon Clustering and Associated Metal Gettering
Y. Jin and S. T. Dunham (University of Washington)
16:20
1656
Deep Levels in W-Doped Czochralski Silicon
E. Simoen (Imec, Ghent Unviversity), K. Saga (Sony Corporation), J. Lauwaert, and H. Vrielinck (Ghent University)
16:40
1657
Ab Initio Analysis on Stability of Metal Atoms in β-Si3N4/Si Structure
D. Shibata, S. Kobayashi, K. Sueoka (Okayama Prefectural University), J. Komachi, and K. Saga (Sony Corporation)
17:00
1658
Mn Related Defect Levels in Germanium
J. Lauwaert, F. Moens, S. H. Segers (Ghent University), K. Opsomer (IMEC), E. Simoen (imec vzw, Ghent University), J. Vanhellemont, P. Clauws, F. Callens, and H. Vrielinck (Ghent University)
See more of: P3: High Purity and High Mobility Semiconductors 13
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