Characterization

Tuesday, October 13, 2015: 16:40-17:20
Phoenix East (Hyatt Regency)
Chairs:
Stefan De Gendt and Jesse S Jur
16:40
987
Raman Spectroscopy of Aluminum-Doped Znic Oxide Thin Films Synthesized By Atomic Layer Deposition
P. Lin (Applied Research Center, Old Dominion University), X. Chen (Applied Research Center), K. Zhang (Applied Research Center), and H. Baumgart (Old Dominion University)
17:00
988
Atomic Layer Deposition and in-Situ Characterization of Yttrium Oxide and Yttria-Stabilized Zirconia
L. Lecordier (Ultratech-Cambridge NanoTech)
See more of: G01: Atomic Layer Deposition Applications 11
See more of: Electronic Materials and Processing
<< Previous Session | Next Session >>