Electronic Materials and Processing

Monday, October 12, 2015

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09:40-10:30

G02: Semiconductor Cleaning Science and Technology 14 (SCST 14)


Welcome and Keynote
104-A
Chair(s): Jerzy Ruzyllo and Richard E Novak

10:00-10:10

G04: ULSI Process Integration 9


Welcome
103-B
Chair(s): Cor Claeys

10:10-12:10

G04: ULSI Process Integration 9


3D Integration & Flexible Electronics
103-B
Chair(s): Cor Claeys and Junichi Murota

10:30-12:00

G02: Semiconductor Cleaning Science and Technology 14 (SCST 14)


Water and Chemicals
104-A
Chair(s): Srini Raghavan and Richard E Novak

10:30-12:10

G05: GaN & SiC Power Technologies 5


Power Electronics Systems
Ellis East
Chair(s): N. Ohtani and Balaji Raghothamachar

13:30-14:40

G02: Semiconductor Cleaning Science and Technology 14 (SCST 14)


Metallic Contamination
104-A
Chair(s): Jin-Goo Park and Koichiro Saga

13:40-16:00

G04: ULSI Process Integration 9


Photonics & High Frequency Devices
103-B
Chair(s): Junichi Murota and Frank Schwierz

14:00-16:00

G05: GaN & SiC Power Technologies 5


Materials Characterization 1
Ellis East
Chair(s): Srabanti Chowdhury and N. Ohtani

14:40-16:00

G02: Semiconductor Cleaning Science and Technology 14 (SCST 14)


Particle Removal
104-A
Chair(s): Koichiro Saga and Jin-Goo Park

Tuesday, October 13, 2015

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08:00-10:00

G04: ULSI Process Integration 9


Ge and III-V Technologies 1
103-B
Chair(s): Hiroshi Iwai and Osamu Nakatsuka

08:10-12:40

G03: Thermoelectric and Thermal Interface Materials 2


Thermoelectric Materials and Devices I
Remington C
Chair(s): Kafil M. Razeeb and Colm O'Dwyer

08:30-10:00

G01: Atomic Layer Deposition Applications 11


Energy Applications I
Phoenix East
Chair(s): Jeffrey W Elam and Fred Roozeboom

09:00-10:00

G05: GaN & SiC Power Technologies 5


Power Switching Devices 1
Ellis East
Chair(s): Robert J. Kaplar and N. Ohtani

09:00-11:00

G02: Semiconductor Cleaning Science and Technology 14 (SCST 14)


Wafer Drying-Related Issues
104-A
Chair(s): Steven Verhaverbeke and Paul W Mertens

10:00-12:00

G04: ULSI Process Integration 9


Ge and III-V Technologies 2
103-B
Chair(s): Hiroshi Iwai and Osamu Nakatsuka

10:00-12:20

G01: Atomic Layer Deposition Applications 11


Energy Applications II
Phoenix East
Chair(s): Jeffrey W Elam and Neil P. Dasgupta

10:30-12:30

G05: GaN & SiC Power Technologies 5


Power Semiconductor Switch Reliability 1
Ellis East
Chair(s): Kenneth A. Jones and Travis J Anderson

11:00-15:40

G02: Semiconductor Cleaning Science and Technology 14 (SCST 14)


Wet Etching and Related Topics
104-A
Chair(s): Kurt Wostyn and Steven Verhaverbeke

13:30-14:30

G05: GaN & SiC Power Technologies 5


Materials Synthesis
Ellis East
Chair(s): Balaji Raghothamachar

13:30-16:00

G04: ULSI Process Integration 9


Gate Stack and Characterization
103-B
Chair(s): Eddy Simoen and Meng Tao

14:00-16:40

G01: Atomic Layer Deposition Applications 11


Textile and Related Coatings
Phoenix East
Chair(s): J. W. Elam and Helmut Baumgart

14:30-17:10

G03: Thermoelectric and Thermal Interface Materials 2


Thermoelectric Materials and Devices II
Remington C
Chair(s): Renkun Chen

15:00-16:00

G05: GaN & SiC Power Technologies 5


Materials Characterization 2
Ellis East
Chair(s): N. Ohtani and Travis J Anderson

15:40-17:30

G02: Semiconductor Cleaning Science and Technology 14 (SCST 14)


BEOL Cleaning
104-A
Chair(s): Kanwaljit Singh and Kurt Wostyn

16:00-18:00

G04: ULSI Process Integration 9


Semiconductor Processing
103-B
Chair(s): John O Borland and Simon Deleonibus

16:40-17:20

G01: Atomic Layer Deposition Applications 11


Characterization
Phoenix East
Chair(s): Stefan De Gendt and Jesse S Jur

18:00-20:00

G02: Semiconductor Cleaning Science and Technology 14 (SCST 14)


G02 Poster Session
West Hall 1

Wednesday, October 14, 2015

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08:00-10:00

G04: ULSI Process Integration 9


Graphene and 2D Devices
103-B
Chair(s): Simon Deleonibus

08:10-12:40

G03: Thermoelectric and Thermal Interface Materials 2


Thermoelectrics and Thermal Transport I
Remington C
Chair(s): Colm O'Dwyer and Robert Wang

09:00-10:00

G01: Atomic Layer Deposition Applications 11


New Materials and Processes I
Phoenix East
Chair(s): Stefan De Gendt and Paul Raymond Chalker

G05: GaN & SiC Power Technologies 5


Power Switching Devices 2
Ellis East
Chair(s): Balaji Raghothamachar and Ron Green

09:00-12:30

G02: Semiconductor Cleaning Science and Technology 14 (SCST 14)


Non-Silicon Materials: Etching, Cleaning, and Conditioning
104-A
Chair(s): Paul W Mertens and Anthony J. Muscat

10:00-11:40

G04: ULSI Process Integration 9


MEMS Applications
103-B
Chair(s): Shinichi Takagi

10:00-12:20

G01: Atomic Layer Deposition Applications 11


New Materials and Processes II
Phoenix East
Chair(s): O. van der Straten and Stefan De Gendt

10:30-12:30

G05: GaN & SiC Power Technologies 5


Power Semiconductor Switch Reliability 2
Ellis East
Chair(s): Kenneth A. Jones and Robert J. Kaplar

13:30-16:00

G04: ULSI Process Integration 9


Memory Technologies
103-B
Chair(s): Anthony O'Neill and Hiroshi Iwai

14:00-15:40

G01: Atomic Layer Deposition Applications 11


Metal Deposition and Applications I
Phoenix East
Chair(s): O. van der Straten and Sean Thomas Barry

G05: GaN & SiC Power Technologies 5


Power Switching Devices 3
Ellis East
Chair(s): Srabanti Chowdhury and Balaji Raghothamachar

14:30-16:30

G03: Thermoelectric and Thermal Interface Materials 2


Thermoelectrics and Thermal Transport II
Remington C
Chair(s): Kafil M. Razeeb and Baratunde Cola

15:40-16:40

G01: Atomic Layer Deposition Applications 11


Metal Deposition and Applications II
Phoenix East
Chair(s): O. van der Straten and Soo-Hyun Kim

18:00-20:00

G01: Atomic Layer Deposition Applications 11


G01 Poster Session
West Hall 1
Chair(s): Fred Roozeboom

G04: ULSI Process Integration 9


G04 Poster Session
West Hall 1

Thursday, October 15, 2015

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08:00-10:00

G01: Atomic Layer Deposition Applications 11


Atomic Layer Etching I
Phoenix East
Chair(s): Fred Roozeboom and Thorsten Lill

10:00-11:40

G01: Atomic Layer Deposition Applications 11


Atomic Layer Etching II
Phoenix East
Chair(s): Craig Huffman and Steven M. George

11:40-12:40

G01: Atomic Layer Deposition Applications 11


Panel Discussion on Atomic Layer Etching
Phoenix East
Chair(s): Craig Huffman