Non-Silicon Materials: Etching, Cleaning, and Conditioning

Mertens, Paul

Non-Silicon Materials: Etching, Cleaning, and Conditioning

Wednesday, October 14, 2015: 09:00-12:30

104-A (Phoenix Convention Center)

Chairs:

Paul W Mertens and Anthony J. Muscat

09:00

Introductory Remarks

09:05

1045

(Invited) Reaction Mechanisms on Binary III-V Semiconductor Surfaces during Etching, Passivation, and Deposition

A. J. Muscat (University of Arizona)

09:45

1046

Surface Chemistry of III-V Semiconductors After Wet Etching with HCl and H₂O₂

P. Mancheno-Posso (University of Arizona) and A. J. Muscat (University of Arizona)

10:05

1047

Nanoscale Etching: Dissolution of III-As and Ge in HCl/H₂O₂ Solutions

D. H. van Dorp (IMEC), D. Weinberger (University of Gent), S. Van Wonterghem (KUL), S. Arnauts (Imec), K. Strubbe (University of Gent), F. Holsteyns (imec), and S. De Gendt (imec)

10:25

1048

Chemical Treatments for Native Oxides Removal of GaAs Wafers

M. Rebaud (CEA, LETI, MINATEC Campus), M. C. Roure, V. Loup (CEA-LETI MINATEC Campus), P. Rodriguez (CEA, LETI, MINATEC Campus), E. Martinez (CEA, LETI, MINATEC Campus), and P. Besson (STMicroelectronics)

10:45

1049

Cleaning of InGaAs and InP Layers for Nanoelectronics and Photonics Contact Technology Applications

P. Rodriguez (CEA LETI), L. Toselli, E. Ghegin (CEA LETI, STMicroelectronics), M. Rebaud, N. Rochat, N. Chevalier, E. Martinez (CEA LETI), and F. Nemouchi (CEA LETI)

11:05

1050

Chemical Passivation of In_0.53Ga_0.47As(100) Using Ammonium Sulfide and Thiols

Y. Contreras (University of Arizona) and A. J. Muscat (University of Arizona)

1051

Wet Processing for Post-epi & Pre-furnace Cleans in Silicon Carbide Power MOSFET Fabrication (Cancelled)

11:45

1052

Dissolution of Germanium in Sulfuric Acid Based Solutions

N. Gan, Y. Ogawa, T. Nagai (Kurita Water Industries LTD.), T. Masaoka (Kurita Water Industries LTD.), K. Wostyn, F. Sebaai, F. Holsteyns (imec), and P. W. Mertens (imec)

12:05

Concluding Remarks

12:10

Cofee Break

See more of: G02: Semiconductor Cleaning Science and Technology 14 (SCST 14)
See more of: Electronic Materials and Processing

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