Metal Deposition and Applications II

Wednesday, October 14, 2015: 15:40-16:40
Phoenix East (Hyatt Regency)
O. van der Straten and Soo-Hyun Kim
(Invited) Metallic Nanocoatings on Optical Fibers as a Sensor Platform
D. J. Mandia, W. Zhou, A. Wells, J. Albert (Carleton University), and S. T. Barry (Carleton University)
Atomic Layer Deposition of Ultrathin TaN and Ternary Ta1-XAlXNy Films for Cu Diffusion Barrier Applications in Advanced Interconnects
S. Consiglio (TEL Technology Center, America, LLC), K. Yu, S. Dey (SUNY Polytechnic Institute), K. Tapily, R. D. Clark, T. Hasegawa, C. S. Wajda (TEL Technology Center, America, LLC), G. J. Leusink (TEL Technology Center, America, LLC), and A. C. Diebold (SUNY Polytechnic Institute)