Metal Deposition and Applications II

Wednesday, October 14, 2015: 15:40-16:40
Phoenix East (Hyatt Regency)
Chairs:
O. van der Straten and Soo-Hyun Kim
15:40
998
(Invited) Metallic Nanocoatings on Optical Fibers as a Sensor Platform
D. J. Mandia, W. Zhou, A. Wells, J. Albert (Carleton University), and S. T. Barry (Carleton University)
16:20
999
Atomic Layer Deposition of Ultrathin TaN and Ternary Ta1-XAlXNy Films for Cu Diffusion Barrier Applications in Advanced Interconnects
S. Consiglio (TEL Technology Center, America, LLC), K. Yu, S. Dey (SUNY Polytechnic Institute), K. Tapily, R. D. Clark, T. Hasegawa, C. S. Wajda (TEL Technology Center, America, LLC), G. J. Leusink (TEL Technology Center, America, LLC), and A. C. Diebold (SUNY Polytechnic Institute)
See more of: G01: Atomic Layer Deposition Applications 11
See more of: Electronic Materials and Processing
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