G01 Atomic Layer Deposition Applications 11

Lead Organizer: F. Roozeboom (Eindhoven University of Technology)

Co-organizers: Jeffrey W Elam (Argonne National Laboratory) , A. Londergan (Qualcomm Technologies, Inc.) , O. van der Straten (IBM Research) , Annelies Delabie (imec) and Stefan De Gendt (imec vzw)

Tuesday, October 13, 2015

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08:30-10:00


Energy Applications I
Phoenix East
Chair(s): Jeffrey W Elam and Fred Roozeboom

10:00-12:20


Energy Applications II
Phoenix East
Chair(s): Jeffrey W Elam and Neil P. Dasgupta

14:00-16:40


Textile and Related Coatings
Phoenix East
Chair(s): J. W. Elam and Helmut Baumgart

16:40-17:20


Characterization
Phoenix East
Chair(s): Stefan De Gendt and Jesse S Jur

Wednesday, October 14, 2015

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09:00-10:00


New Materials and Processes I
Phoenix East
Chair(s): Stefan De Gendt and Paul Raymond Chalker

10:00-12:20


New Materials and Processes II
Phoenix East
Chair(s): O. van der Straten and Stefan De Gendt

14:00-15:40


Metal Deposition and Applications I
Phoenix East
Chair(s): O. van der Straten and Sean Thomas Barry

15:40-16:40


Metal Deposition and Applications II
Phoenix East
Chair(s): O. van der Straten and Soo-Hyun Kim

18:00-20:00


G01 Poster Session
West Hall 1
Chair(s): Fred Roozeboom

Thursday, October 15, 2015

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08:00-10:00


Atomic Layer Etching I
Phoenix East
Chair(s): Fred Roozeboom and Thorsten Lill

10:00-11:40


Atomic Layer Etching II
Phoenix East
Chair(s): Craig Huffman and Steven M. George

11:40-12:40


Panel Discussion on Atomic Layer Etching
Phoenix East
Chair(s): Craig Huffman