Atomic Layer Etching I

Thursday, October 15, 2015: 08:00-10:00

Phoenix East (Hyatt Regency)

Chairs:

Fred Roozeboom and Thorsten Lill

08:00

1005

S. Suri, C. T. Carver, R. Turkot Jr., P. E. Romero, T. A. Tronic (Intel Corporation), and J. Plombon (Intel Corporation)

08:40

1006

A. Hinckley (University of Arizona), P. Mancheno-Posso, C. S. Lai (LAM Research), and A. J. Muscat (University of Arizona)

09:00

1007

Y. Lee, J. W. DuMont (University of Colorado), and S. M. George (University of Colorado)