Wednesday, 1 June 2016: 18:00-20:00
Exhibit Hall H (San Diego Convention Center)
Chairs:
Durga Misra
,
Zhi David Chen
and
Yaw S. Obeng
1024
Effect of Cu Drift on Dielectric Breakdown for Porous Low Dielectric Constant Film under Static and Dynamic Stress (Cancelled)
1027
Effects of Precursor Flow Rates on Characteristics of Low-K SiOC(H) Film Deposited by Plasma-Enhanced Chemical Vapor Deposition (Cancelled)