D02 Poster Session

Wednesday, 1 June 2016: 18:00-20:00
Exhibit Hall H (San Diego Convention Center)
Non-Prestonian Behavior Study and Development of Advanced Oxide Polish Slurry for Stop-In-Film Applications
H. Zhou, K. Murella, J. Hughes, and M. O'Neill (Air Products & Chemicals)
Development of Cobalt Chemical Mechanical Planarization Slurries By Electrochemical/Surface Analytical Screening and Polishing Studies
M. G. Theivanayagam, H. Wang, J. Cohen, M. VanHanehem, T. Sabo, and S. DeNardi (Dow Electronic Materials, The Dow Chemical Company)
Role of Cerium Oxide Surface Chemistry in Adsorption of Polyacrylic Acid in CMP Slurries
S. Saraf (Advanced Materials Processing and Analysis Center, University of Central Florida), A. Mesbahi (University of Central Florida), J. Harper (Department of Chemistry, University of Central Florida), and S. Seal (University of Central Florida, Advanced Materials Processing and Analysis Center)