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Canceled Presentations
Dielectric Science and Materials
Monday, 30 May 2016
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08:00-12:20
D04: Plasma and Thermal Processes for Materials Modification, Synthesis and Processing
Plasma and Thermal Processes for Materials Modification, Synthesis and Processing 1
Aqua 309
Chair(s):
Sreeram Vaddiraju, Uros Cvelbar and Peter Mascher
08:25-10:30
D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing -and- Solid State Topics General Session
Dielectrics in Memory Systems
Sapphire 410 A
Chair(s):
Daniel Bauza, Zhi David Chen and Yaw S. Obeng
10:30-12:30
D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing -and- Solid State Topics General Session
Dielectric and Substrate Processing
Sapphire 410 A
Chair(s):
Luca Perniola and Yongxun Liu
13:45-16:00
D04: Plasma and Thermal Processes for Materials Modification, Synthesis and Processing
Plasma and Thermal Processes for Materials Modification, Synthesis and Processing 2
Aqua 309
Chair(s):
Sreeram Vaddiraju, Dennis W Hess and Uros Cvelbar
14:00-15:50
D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing -and- Solid State Topics General Session
Devices and Dielectrics
Sapphire 410 A
Chair(s):
Clement Merckling and Junichi Murota
Tuesday, 31 May 2016
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08:30-12:10
D04: Plasma and Thermal Processes for Materials Modification, Synthesis and Processing
Plasma Processing
Aqua 309
Chair(s):
Manfred Engelhardt, Dennis W Hess and O. M Leonte
08:30-12:30
D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing -and- Solid State Topics General Session
Characterization and Analysis
Sapphire 410 A
Chair(s):
Anabela Veloso, K. Kita and Yaw S. Obeng
14:00-16:00
D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing -and- Solid State Topics General Session
Reliability and Analysis
Sapphire 410 A
Chair(s):
Irina Ionica and Joseph J. Kopanski
14:00-16:15
D04: Plasma and Thermal Processes for Materials Modification, Synthesis and Processing
Plasma and Thermal Processes for Materials Modification, Synthesis and Processing 3
Aqua 309
Chair(s):
Manfred Engelhardt, O. M Leonte and Dennis W Hess
18:00-20:00
D04: Plasma and Thermal Processes for Materials Modification, Synthesis and Processing
D04 Poster Session
Exhibit Hall H
Chair(s):
Sreeram Vaddiraju and Manfred Engelhardt
Wednesday, 1 June 2016
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08:30-09:10
D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing -and- Solid State Topics General Session
Low Dielectric Constant Materials
Sapphire 410 A
Chair(s):
O. M Leonte and Paul A Kohl
08:30-11:40
D02: Chemical Mechanical Polishing 14
CMP Applications and Integration
Sapphire 411 B
Chair(s):
Gautam Banerjee
09:10-11:50
D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing -and- Solid State Topics General Session
Dielectrics for Optoelectronics
Sapphire 410 A
Chair(s):
Robert D. Clark and Jifa Hao
13:10-16:00
D02: Chemical Mechanical Polishing 14
CMP Control Systems
Sapphire 411 B
Chair(s):
G. Bahar Basim
14:00-16:35
D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing -and- Solid State Topics General Session
High Dielectric Constant Materials and Metal Gates
Sapphire 410 A
Chair(s):
J. Heitmann and Takahiro Nagata
18:00-20:00
D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing -and- Solid State Topics General Session
D01 Poster Session
Exhibit Hall H
Chair(s):
Durga Misra, Zhi David Chen and Yaw S. Obeng
D02: Chemical Mechanical Polishing 14
D02 Poster Session
Exhibit Hall H
Thursday, 2 June 2016
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08:30-13:30
D02: Chemical Mechanical Polishing 14
CMP Fundamentals
Sapphire 411 B
Chair(s):
V. Chaitanya
13:30-16:20
D02: Chemical Mechanical Polishing 14
Emerging CMP Technologies
Sapphire 411 B
Chair(s):
Yaw S. Obeng
