In this work, a copper (I) catalyzed azide alkyne cycloaddition (CuAAC) reaction, combined with microcontact printing was employed successfully to pattern alkyne-terminated self-assembled organic monolayer modified silicon surfaces (Figure 1a). Despite the absence of a copper peak in XPS spectra, copper contamination was found and visualized using LAPS and SPIM, after the ‘click’ modified silicon surfaces were rinsed with hydrochloric acid solution (Figure 1b), which has been frequently used to remove copper residues in the past. Different strategies for avoiding copper contamination, including the use of bulky chelators for the copper (I) catalyst and rinsing with different reagents, were tested. Only cleaning of the silicon surfaces with an ethylenediaminetetraacetic acid (EDTA) solution after the ‘click’ modification proved to be an effective method as confirmed by LAPS and SPIM results, which showed the desirable electrical properties (surface charge and impedance) of an organic monolayer (Figure 1c).
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