G02 Poster Session

Tuesday, 30 May 2017: 18:00-20:00
Grand Ballroom (Hilton New Orleans Riverside)
Evgeni Gusev and P. J. Timans
Thermal Budget Reduction in Triple Gate Oxide Process by Wet Etch Technique
H. Tai, H. Y. Liao, H. A. Chen, P. T. Tou, W. T. Liu, M. C. Lu, and T. H. Ying (Powerchip Technology Corporation)
Reliability Characteristics of Low Dielectric Constant Materials Under Mechanical-Electrical Stress (Cancelled)