Tuesday, 3 October 2017: 08:30-12:20
Chesapeake D (Gaylord National Resort and Convention Center)
Chairs:
Shinichi Takagi
and
Koji Kita
09:00
(Invited) “Magic of Doped High k Films for Advanced Memory and Ferroelectric Applications Using 300mm QXP ALD” - Zia Karim, Jerry Mack, Vincent Vezin and Niloy Mukherjee, AIXTRON and Asif I Khan, Georgia Tech.
828
(Invited) Modifying Silicon/Dielectric & Silicon/Metal Interfaces Using Sub-2 Nm Pt Nanoparticles (Cancelled)
09:50
11:20
11:50