Sponsor(s):
Electronics and Photonics,
Dielectric Science and Technology
Lead Organizer: Hemanth Jagannathan (IBM Corporation Research Center)
Co-organizers: Kuniyuki Kakushima (Tokyo Institute of Technology) , Paul Timans (Thermal Process Solutions Limited) , Evgeni Gousev (Qualcomm MEMS Technologies) , Zia Karim (Yield Engineering Systems) , Stefan De Gendt (KU Leuven, imec) , Durga Misra (New Jersey Institute of Technology) , Yaw Obeng (NIST) and Fred Roozeboom (TNO-Holst Centre, Eindhoven)