1022
(Invited) Heterogeneous Integration of III-V Semiconductors on Si Photonics Platform

Monday, 1 October 2018: 08:30
Universal 13 (Expo Center)
T. Hiraki, T. Aihara, K. Hasebe, T. Fujii, K. Takeda, H. Nishi, T. Kakitsuka, T. Tsuchizawa, H. Fukuda, and S. Matsuo (NTT Corporation)
A silicon photonics platform is promising for manufacturing compact and low cost optical transceivers. Ge photodetectors have been developed by the epitaxial growth on Si. The next challenge is the on-silicon integration of group III-V semiconductors for laser diodes and high efficiency modulators. In this work, the III-V semiconductors are integrated on a silicon-on-insulator wafer by using the wafer bonding processes. We review the Ge-on-Si photodetectors and recently developed high efficiency III-V-on-Si metal-oxide-semiconductor capacitor Mach-Zehnder modulators.