History of Atomic Layer Deposition

Monday, 1 October 2018: 12:00-12:40
Universal 16 (Expo Center)
Chairs:
Chanyuan Liu and Fred Roozeboom
12:00
987
(Invited) Learnings from an Open Science Effort: Virtual Project on the History of ALD
R. L. Puurunen (Aalto University School of Chemical Engineering)
See more of: G02: Atomic Layer Deposition Applications 14
See more of: Electronic Materials and Processing
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