865
Visualization of Plasma Etching Damage of Si Using Room Temperature Spectroscopic Photoluminescence

Tuesday, May 14, 2013: 11:20
Norfolk, Mezzanine Level (Sheraton)
Shiu-Ko Jang Jian, Ph.D. , Taiwan Semiconductor Manufacturing Company, Tainan, Taiwan
Chih-Cherng Jeng, Ph.D. , Taiwan Semiconductor Manufacturing Company
Ting-Chun Wang, Ph.D. , Taiwan Semiconductor Manufacturing Company
Chih-Mu Huang, Ph.D. , Taiwan Semiconductor Manufacturing Company
Ying-Lang Wang, Ph.D. , Taiwan Semiconductor Manufacturing Company
Woo Sik Yoo, Ph. D. , WaferMasters, Inc., San Jose, CA

Abstract:

  • E5-0865 (209.0KB) - Abstract Text
See more of: Patterning and Lithography Challenges Part 1
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