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A Study of Polysilicon Gate Etch Uniformity in 300 mm Silicon Wafers

Tuesday, May 14, 2013: 11:00
Norfolk, Mezzanine Level (Sheraton)
Wai Shing Lau, PhD , Nanyang Technological University-Retired, Edmonton, AB, Canada
Peizhen Yang, PhD , GLOBALFOUNDRIES
Soh Yun Siah, PhD , GLOBALFOUNDRIES

Abstract:

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