2080
Investigation of Bomb Defects: Reducing the Defect From Perhydropolysilazane Layer On Semiconductor

Tuesday, October 29, 2013: 16:20
Union Square 21, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Chae Jung Lee, a Master's degree , Memory Defect Engineering Group, Semiconductor Business, Samsung Electronics Co., LTD., Banwol-dong, Hwasung-City, 445-701, Gyeonggi-Do, Republic of Korea, Samsung Electronics, Hwasung-city, South Korea
Yun Ho Kim, a doctoral degree , Samsung Electronics
Jin Sung Kim, a doctoral degree , Samsung Electronics
Jung sook OH, bachelor's degree , samsung electronics
Byoung Deog Choi, doctoral degree , Sungkyunkwan University, Suwon, South Korea

Abstract:

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