2079
Investigation On Pad Surface Conditioner to Control Dishing Amount in Cu Damascene Process

Tuesday, October 29, 2013: 16:00
Union Square 21, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Jong won Kim, bachelor's degree , Memory Cleaning/CMP Technology Team, Hwaseong-si, South Korea

Abstract:

See more of: Copper Damascene Interconnections
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See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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