2127
Influence of Geometry, Edges and Roughness on Liquid Penetration and Removal During Wet Cleaning

Tuesday, October 29, 2013
Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)
C. W. Extrand , Entegris, Chaska, MN
Sung In Moon , Entegris

Abstract:

  • E8-2127 (228.1KB) - Abstract Text
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See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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