2077
Mechanistic Study of Autocatalysis During Electroless Copper Deposition

Tuesday, October 29, 2013: 15:00
Union Square 21, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Rohan Akolkar , Case Western Reserve, Cleveland, OH
Lu Yu , Case Western Reserve
Lian Guo , Atotech Gmbh
Robert Preisser , Case Western Reserve

Abstract:

  • E7-2077 (660.9KB) - Abstract Text
See more of: Copper Damascene Interconnections
See more of: E7: Processing, Materials, and Integration of Damascene and 3D Interconnects 5
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
<< Previous Abstract | Next Abstract >>