2059
Characterization of Local Stress in Silicon Around Through-Silicon Via Interconnects By Using Micro Raman Spectroscopy

Monday, October 28, 2013: 15:20
Union Square 21, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Jae-Hyun Kim, Ph. D candiate , Yuseong-gu, SK Hynix, Daejeon, South Korea

Abstract:

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