1882
Room Temperature Sensing of O2 and CO by Atomic Layer Deposition Prepared ZnO Films Coated with Pt Nanoparticles

Thursday, October 31, 2013: 17:20
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Ivo Erkens , Holst centre/IMEC, Eindhoven, Netherlands
Michiel Blauw , Holst centre/IMEC
Marcel Verheijen , Eindhoven University of Technology
F. Roozeboom , Eindhoven University of Technology
W. M. M. Kessels , Eindhoven University of Technology

Abstract:

  • E2-1882 (426.3KB) - Abstract Text
See more of: Oxides and Conductors for Advanced Devices
See more of: E2: Atomic Layer Deposition Applications 9
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
<< Previous Abstract | Next Abstract >>