1876
(Invited) Advanced Dielectrics Targeting 2X DRAM MIM Capacitors

Thursday, October 31, 2013: 14:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Mihaela Popovici , imec, Leuven, Belgium
Johan Swerts , imec
Marc Aoulaiche , imec
Augusto Redolfi , imec
Ben Kaczer , imec
Min-Soo Kim , imec
Bastien Douhard , imec
Annelies Delabie , imec
Sergiu Clima , imec
Malgorzata Jurczak , imec
S. Van Elshocht , imec

Abstract:

See more of: Oxides and Conductors for Advanced Devices
See more of: E2: Atomic Layer Deposition Applications 9
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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