1877
ALD of SrTiO3 and Pt for Pt/SrTiO3/Pt MIM Structures: Growth and Crystallization Study

Thursday, October 31, 2013: 14:40
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Valentino Longo , Eindhoven University of Technology, Eindhoven, Netherlands
F. Roozeboom , Eindhoven University of Technology
W.M.M. Kessels , Eindhoven University of Technology
Marcel Verheijen , Eindhoven University of Technology

Abstract:

  • E2-1877 (172.5KB) - Abstract Text
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