2140
(Invited) Multiphonon Processes as the Origin of Reliability Issues

Monday, October 28, 2013: 09:10
Union Square 22, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Wolfgang Goes , Institute for Microelectronics, Vienna, Austria
Maria Toledano-Luque , imec
Franz Schanovsky , Institute for Microelectronics
Markus Bina , Institute for Microelectronics
Oskar Baumgartner , Institute for Microelectronics
Ben Kaczer , imec
Tibor Grasser , Institute for Microelectronics

Abstract:

See more of: Defects, Traps, and Reliability
See more of: E10: Semiconductors, Dielectrics, and Metals for Nanoelectronics 11
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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