Fin Doping by Hot Implant for 14nm FinFET Technology and Beyond

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Fin Doping by Hot Implant for 14nm FinFET Technology and Beyond

Tuesday, October 29, 2013: 16:50

Continental 7, Tower 3, Ballroom Level (Hilton San Francisco Union Square)

Bingxi Sun Wood, Ph.D. , Applied Materials, Sunnyvale, CA

Fareen Adeni Khaja, MS , Applied Materials

Benjamin P Colombeau, Ph. D. , Applied Materials

Shiyu Sun, Ph. D. , Applied Materials

Andrew Waite, Ph. D. , Applied Materials

Miao Jin, Ph. D. , Applied Materials

Hao Chen, Ph. D. , Applied Materials

Osbert Chan , Applied Materials

Thirumal Thanigaivelan, MS , Applied Materials

Nilay Pradhan, Ph. D. , Applied Materials

Hans-Joachim L Gossmann, Ph. D. , Applied Materials

Shashank Sharma, Ph. D. , Applied Materials

Venkataramana R Chavva, Ph. D. , Applied Materials

Man-Ping Cai , Applied Materials

Motoya Okazaki , Applied Materials

Samuel Swaroop Munnangi, MS , Applied Materials

Chi-Nung Ni, Ph. D. , Applied Materials

Wesley Suen , Applied Materials

Chorng-Ping Chang, Ph. D. , Applied Materials

Abhilash Mayur, Ph. D. , Applied Materials

Naushad Variam, Ph. D. , Applied Materials

Adam D Brand, MS , Applied Materials

Abstract: