2101
Silicon and SiGe Alloys Wet Etching Using TMAH Chemistry

Monday, October 28, 2013: 14:20
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Virginie Loup , CEA-LETI MINATEC, Grenoble, France
Laurence Gabette , CEA-LETI MINATEC, Grenoble, France
Marie-Christine Roure , CEA-LETI MINATEC
Riadh Kachtouli , CEA-LETI MINATEC
Marine Jourdan , CEA-LETI MINATEC
Pascal Besson , STMicroelectronics
Sebastien Petitdidier , STMicroelectronics

Abstract:

  • E8-2101 (561.3KB) - Abstract Text
See more of: Wet Etching and Cleaning
See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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