2240
ALD W CMP for HKMG
ALD W CMP for HKMG
Wednesday, October 30, 2013: 09:00
Continental 7, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Tao Yang
,
Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
Guilei Wang
,
Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
Qiang Xu
,
Institute of Microelectronics of Chinese Academy of Sciences
Yihong Lu
,
Institute of Microelectronics of Chinese Academy of Sciences
Jiahan Yu
,
Institute of Microelectronics of Chinese Academy of Sciences
Hushan Cui
,
Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China
Jiang Yan
,
Institute of Microelectronics of Chinese Academy of Sciences
Junfeng Li
,
Institute of Microelectronics of Chinese Academy of Sciences
Chao Zhao
,
Institute of Microelectronics of Chinese Academy of Sciences
Abstract:
- E12-2240 (137.8KB) - Abstract Text
See more of: Back-end Processing 2
See more of: E12: ULSI Process Integration 8
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
See more of: E12: ULSI Process Integration 8
See more of: Dielectric and Semiconductor Materials, Devices, and Processing