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Back Gate Bias Stressing on Extremely Thin SOI (ETSOI) MOSFETs with Gate Last Process Integration
Figure.1. shows the detail integration flow of ETSOI with HKMG and TEM of cross section of gate structure. In Fig. 2, Id-Vg curves for different channel thickness are plotted. It can be seen that shift of voltage with thicker channel layer of 11nm is larger than that with thinner channel layer of 4nm. Fig. 3 displays Vt difference under back gate bias stressing for different channel thickness.
In conclusion, we have successfully fabricated extremely thin SOI (ETSOI) devices with both HK and MG last integration scheme. Excellent device performances are achieved and back gate bias stressing on device characteristic is analyzed. With thicker channel layers, devices are more sensitive to back gate bias, while with thinner channel layers; devices are more convergent for electrical characteristic.
References
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