Finfet Gate Etch Towards 16nm Node CMOS Technology
P. Hong, Z. Zhao, C. Li, L. Meng, X. He (Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China), J. Han (Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences), Y. Lu (Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China), W. Xiong (Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences), Y. Zhang, H. Yin (Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing, China), H. Zhu (Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences), J. Li, J. Yan, and C. Zhao (Institute of Microelectronics of Chinese Academy of Sciences)