P5 Processing Materials of 3D Interconnects, Damascene, and Electronics Packaging 6

Lead Organizer: Kazuo Kondo (Osaka Prefecture University)

Co-organizers: Rohan Akolkar (Case Western Reserve University) , D. P. Barkey (University of New Hampshire) , Wei-Ping Dow (National Chung Hsing University) , Masanori Hayase (Tokyo University of Science) , Mitsumasa Koyanagi (Tohoku University) , S. Mathad (S/C Technology Consulting) , Peter Ramm (Fraunhofer Research Institution EMFT Munich) , F. Roozeboom (Eindhoven University of Technology) and Shoso Shingubara (Kansai University)

Monday, 6 October 2014

13:00-16:00


Through Silicon Via I
Expo Center, 1st Floor, Universal 13
Chair(s): Kazuo Kondo, S. Mathad, Rohan Akolkar and Wei-Ping Dow

Tuesday, 7 October 2014

08:00-12:40


Through Silicon Via II
Expo Center, 1st Floor, Universal 13
Chair(s): Shoso Shingubara and Mitsumasa Koyanagi

15:00-17:00


Fundamentals in Electrodeposition I
Expo Center, 1st Floor, Universal 13
Chair(s): Masanori Hayase and Rohan Akolkar

Wednesday, 8 October 2014

07:40-10:00


Fundamentals in Electrodeposition II
Expo Center, 1st Floor, Universal 13
Chair(s): Masanori Hayase and Rohan Akolkar

10:20-12:00


Copper Damascene
Expo Center, 1st Floor, Universal 13
Chair(s): Wei-Ping Dow and F. Roozeboom

14:00-15:40


Electronics Packaging
Expo Center, 1st Floor, Universal 13
Chair(s): S. Mathad and Shoso Shingubara